00 jp 04 328874 11 patents

$Method and system for controlling the presence of fluorine in refractory ...$

Method and system for controlling the presence of fluorine in refractory ...

Filed: July 25th, 2000 [Granted]

Patent Number: 6855368

... JP 03-023299 1/1991 C30B/29/40 JP 2000-031387 1/2000 H01L/27/04 JP ... 11/ 1992 C30B/33/00 wo 91/10510 Al 7/1991 B01J/37/02 JP 04-328874 11/1992 ...

Lid assembly for a processing system to facilitate sequential deposition ...

Filed: December 12th, 2001 [Granted]

Assignee: Applied Materials Inc

Patent Number: 6878206

... 10/1990 H01L/29/784 JP 02-264491 10/1990 HOIS/3/18 JP 02-283084 11/1990 ... 10/1992 H01L/21/205 JP 04-325500 11/1992 C30B/33/00 JP 04-328874 11/1992 ...

Gas delivery apparatus and method for atomic layer deposition

Filed: December 21st, 2001 [Granted]

Assignee: Applied Materials Inc

Patent Number: 6916398

... JP 01-272108 10/1989 H01L/21/203 JP 01-290221 11/1989 H01L/21/205 JP ... 10/ 1992 H01L/21/205 JP 04-325500 11/1992 C30B/33/00 JP 04-328874 11/1992 ...

Apparatus for integration of barrier layer and seed layer

Filed: May 15th, 2007 [Granted]

Assignee: Applied Materials Inc

Patent Number: 7494908

... 02-230722 9/1990 JP 02-246161 9/1990 JP 02-264491 10/1990 JP 02-283084 11/ 1990 JP ... JP 04-285167 10/1992 JP 04-325500 11/1992 JP 04-328874 11/1992 JP ...

Integration of titanium and titanium nitride layers

Filed: April 8th, 2002 [Granted]

Assignee: Applied Materials Inc

Patent Number: 6911391

... JP 04-291916 10/1992 H01L/21/205 JP 63-252420 10/1988 H01L/21/205 JP 04- 325500 11/1992 C30B/33/00 JP 63-266814 11/1988 H01L/21/205 JP 04-328874 11/1992 ...

Chamber for uniform substrate heating

Filed: December 15th, 2003 [Granted]

Assignee: Applied Materials Inc

Patent Number: 6998579

... 10/1992 JP 04-325500 11/1992 JP 04-328874 11/1992 JP 05-029228 2/1993 JP ... wo 99/65064 12/1999 wo 00/11721 3/2000 wo 00/15865 Al 3/2000 wo 00/15881 A2 ...

Formation of boride barrier layers using chemisorption techniques

Filed: June 27th, 2000 [Granted]

Assignee: Applied Materials Inc

Patent Number: 6620723

... H01L/39/24 JP 03-070124 3/1991 H01L/21/205 FR 2.692.597 12/1993 C23C/16/00 JP ... 11/1992 C30B/33/00 JP 64-009896 1/1989 C30B/29/40 JP 04-328874 11/1992 ...

Method for forming tungsten materials during vapor deposition processes

Filed: June 21st, 2007 [Granted]

Assignee: Applied Materials Inc

Patent Number: 7465666

... JP 04-291916 10/1992 JP 04-325500 11/1992 JP 04-328874 11/1992 JP 05-029228 ... wo WO 00/11721 3/2000 wo WO 00/15865 3/2000 wo WO 00/15881 3/2000 wo WO ...