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Method for depositing fluorocarbon films on polymer surfaces
Filed: April 27th, 2007 [Granted]
Patent Number: 7879418
1 METHOD FOR DEPOSITING FLUOROCARBON FILMS ON POLYMER SURFACES STATEMENT AS TO RIGHTS TO INVENTIONS 5 MADE UNDER FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT ...
Fluorocarbon-organosilicon copolymers and coatings prepared by hot-filament ...
Filed: October 29th, 2002 [Granted]
Assignee: Massachusetts Institute of Technology
Patent Number: 6887578
There still exists a need for a reliable method of depositing fluorocarbon- organosilicon copolymer thin films with well-resolved bonding environments.
Method of depositing and amorphous fluorocarbon film using HDP-CVD
Filed: October 10th, 1997 [Granted]
Assignee: Applied Materials Inc
Patent Number: 6211065
More particularly, the present invention relates to a method 10 of depositing an amorphous fluorocarbon film using a high bias power to enhance gap fill ...
Fluorocarbon film and method for forming same
Filed: November 9th, 2004 [Granted]
Assignee: Kyoto University Zeon Corporation
Patent Number: 7648922
3 shows a system diagram showing an example of an apparatus for depositing a fluorocarbon film. In the plasma enhanced chemical vapor deposition apparatus ...
Plasma deposition of fluorocarbon
Filed: July 9th, 1993 [Granted]
Patent Number: 5302420
The fluorocarbon films as determined by x-ray photoemission spectroscopy have ... On the other hand, films deposited at relatively higher pressure and a low ...
Chemical vapor deposition of fluorocarbon polymer thin films
Filed: March 29th, 1999 [Granted]
Assignee: Massachusetts Institute of Technology
Patent Number: 6156435
Films as thin as a few microns are acceptable for many applications. A second deposition process is provided by the invention for forming a fluorocarbon ...
Thin amorphous fluorocarbon films
Filed: January 22nd, 1999 [Granted]
Assignee: Intel Corporation
Patent Number: 6528865
The fluorocarbon may include C4F8, C5F8, or C6F6. The hydrocarbon may include CH4, C2H4, C2H2, and C2H6. CxFy ILD films deposited with these combinations of ...
Plasma deposited fluorinated amorphous carbon films
Filed: May 3rd, 1999 [Granted]
Patent Number: 6150258
One attempt at a polymeric fluorocarbon layer is 50 described in US Pat. No. 5244730, "PLASMA DEPOSITION OF FLUOROCARBON." The fluorocarbon film, prepared ...
