Related Searches
Recent Searches
- turbo data laboratory inc
- their use as electrical
- inhibitors tricyclic compounds
- traffic flow change monitoring
- twist throttle control device
- injection moldable amide imide
- two piece propel repel dispenser
- utility threshold 24 according
- tractor having guidance system
- 7544144
- acid base cements
- oxypropylene connecting group
- depositing fluorocarbon films on
- dumper dust collection method
- 0037146 al 11 2001
Popular Searches
- billboard advertising
- billboard advertising system
- mobile billboard advertising system
- bombardier rotax gmbh
- mobile billboard system
- billboard system
- mobile multi message billboard advertising
- linux
- multi message billboard advertising system
- using domain
- multimedia advertising billboard
- brown midrib
- advertising billboard
- g fl peg
- mobile billboard advertising
Semiconductor substrate deposition processor chamber liner apparatus
Filed: January 23rd, 2003 [Pending]
Patent Application Number: 10350554
... SEMICONDUCTOR SUBSTRATE DEPOSITION PROCESSOR CHAMBER LINER APPARATUS TECHNICAL FIELD [0001] This invention relates to methods of replacing at least a ...
Method of replacing at least a portion of a semiconductor substrate ...
Filed: April 11th, 2002 [Granted]
Assignee: Micron Technology Inc
Patent Number: 6613587
In one implementation, a semiconductor substrate deposition processor chamber liner apparatus includes a plurality of pieces which when assembled within a ...
Method of replacing at least a portion of semiconductor substrate deposition ...
Filed: March 24th, 2003 [Pending]
Patent Application Number: 10396268
... Method Of Depositing Materials Over A Plurality Of Semiconductor Substrates, And Semiconductor Substrate Deposition Processor Chamber Liner Apparatus", ...
Engagement mechanism for semiconductor substrate deposition process kit hardware
Filed: June 5th, 2002 [Granted]
Assignee: Micron Technology Inc
Patent Number: 6620253
... Method Of Depositing Materials Over A Plurality Of Semiconductor Substrates, And Semiconductor Substrate Deposition Processor Chamber Liner Apparatus", ...
Chemical vapor deposition apparatus
Filed: October 28th, 2003 [Pending]
Patent Application Number: 10695726
Load lock chambers are utilized to transfer semiconductor substrates, typically individually, from room ambient to within processor 10 for deposition or ...
Semiconductor substrate processing chamber and substrate transfer chamber ...
Filed: August 22nd, 2005 [Pending]
Patent Application Number: 11208964
Some wafer processors, particularly deposition processors, utilize a substrate transfer chamber which is connected with a plurality of separate substrate ...
Manifold assembly for feeding reactive precursors to substrate processing ...
Filed: February 28th, 2002 [Pending]
Patent Application Number: 10087558
... invention relates to apparatus used to feed reactive precursors to substrate processing chambers, for example etching chambers and deposition chambers.
Semiconductor substrate processing chamber and accessory attachment ...
Filed: October 28th, 2003 [Granted]
Assignee: Micron Technology Inc
Patent Number: 7192487
Some wafer processors, particularly deposition processors, utilize a substrate transfer chamber which is connected with a plurality of separate substrate ...
