Fluorocarbon film and method for forming same
Filed: November 9th, 2004 [Granted]
Patent Number: 7648922
11 400° C. for 1 hour, a fluorocarbon film having a specific inductive capacity of 1.5 was obtained. Since decrease in the film thickness can be suppressed ...
Adhesion promotion of fluorocarbon films
Filed: January 4th, 1995 [Granted]
Patent Number: 5549935
The C2F4 feed is continued at the above conditions for about 20 minutes to provide a polymerized fluorocarbon film of about 0.6 microns thick.
Method for depositing fluorocarbon films on polymer surfaces
Filed: April 27th, 2007 [Granted]
Patent Number: 7879418
1 METHOD FOR DEPOSITING FLUOROCARBON FILMS ON POLYMER SURFACES STATEMENT AS TO RIGHTS TO INVENTIONS 5 MADE UNDER FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT ...
FLUOROCARBON FILM AND PROCESS FOR ITS PRODUCTION
Filed: May 2nd, 2007 [Pending]
Patent Application Number: 11743260
[0101] According to the process for producing a fluorocarbon film of the present invention, a fluorocarbon film may be formed which has a structural ...
Method for fluorocarbon film depositing
Filed: June 24th, 2002 [Pending]
Patent Application Number: 10178910
24, 2002 and entitled Method of Forming a Fluorocarbon Polymer Film on a Substrate Using a Passivation Layer, the contents of both which are incorporated ...
Promotion of the adhesion of fluorocarbon films
Filed: November 15th, 1995 [Granted]
Patent Number: 5788870
The process as described herein provides for a tenacious bond between the substrate and polymeric fluorocarbon film. An alternative method for forming a ...
METHOD FOR PURIFYING UNSATURATED FLUOROCARBON COMPOUND, METHOD FOR FORMING ...
Filed: November 30th, 2006 [Pending]
Patent Application Number: 12085675
A method for forming a fluorocarbon film comprising forming a fluorocarbon film by a CVD method using a purified unsaturated fluorocarbon compound obtained ...
INTERLAYER INSULATING FILM, INTERCONNECTION STRUCTURE, AND METHODS OF ...
Filed: January 10th, 2011 [Pending]
Patent Application Number: 12987914
Specially, it is preferable that the first fluorocarbon film is provided for ... [0025] In addition, the first fluorocarbon film may be formed by CVD using ...