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Fluorocarbon film and method for forming same
Filed: November 9th, 2004 [Granted]
Assignee: Kyoto University Zeon Corporation
Patent Number: 7648922
Ill llllllll III 111 111 IjjlJjjj IIIIIIJP ^ ^ ^ ^ (12) United States Patent Shirafuji et al. (io) Patent No.: (45) Date of Patent: US 7648922 B2 Jan.
